Title of Invention

4-DOF fast steer mirror laer compensation system

Technology

There are many studies which mentioned that the geometric fluctuations of the laser light beam are not only effected by environmental conditions but also effected by the input and its structure and thermal issue. If we could propose a fast steer mirror (FSM) compensation system to improve the stability of the laser beam and reduce geometric errors of the laser beam, we could have the high quality laser light beam and high value laser equipement. This pattent proposes a laser compensation system and a 4-DOF fast steer mirror(FSM) to improve the stability and decrease the geometric error of laser beam( includinfg two displacement and two rotation error ). Moreover, improve the disadvantages of overlong optical path length, many elements, and difficulty in set-up process of traditional FSM.

Benefits

The proposed 4-DOF FSM laser compensation system is capable of decreasing the 4-DOF geometric error of laser beam and improve the disadvantages of overlong optical path length, many elements, and difficulty in set-up process of traditional FSM. The proposed system is the better option than traditional FSM because of the shorter optical path length, less element and easily in set-up process.

Possible Applications/ Industry Categories

The proposed 4-DOF FSM laser compensation system can compensate  4-DOF geometric errors of laser beam, making it the ideal solution for any manufacturing facility that utilizes laser equipment.

Contact Information

Innovation Headquarters, NCKU

Contact person：Claire Huang

E-mail：clairehu@mail.ncku.edu.tw